>> P.265
WhiteLightInterferenceOpticalUnitWLI-Unit>Non-contacthigh-accuracyfinesurfacetexturemeasurementispossiblethroughwhitelightinterference*:3Dshapemeasurement.>HeightmeasurementaccuracynotdependentonopticalmagnificationMeasurementenabledwithhighZ-resolutionevenwithlow-magnificationlens>HighaspectratiomeasurementSupportshighaspectratioshapemeasurementthroughdetectionnotdependentonoptical-basedNA>Highrobustnesswithregardtodisturbancevibration>Compactandlightweight*Theresultsmaybeaffectedbytheshapeandsurfacetextureoftheobjectbeingobserved.*Objectivesshownmountedontubesareoptional.SpecificationsCodeNo.ModelWLI-UnitSensorHeadWLIMeasurement(WLI-Unit-003/005/010Common)WLI-UnitControllerSoftwareOtherCablelength(m)Applicableobjectivelens*OptionalselectionTubelensmagnificationFocalrange(fmm)ScanningmechanismSize/WeightZmotionrangeMeasurementmodeWLImeasurementZrangeThroughput@20µmrangeZresolutionZrepeatability(σ)I/FRatedvoltageMax.powerconsumptionSize/WeightWLIPAKWLI-UnitCalibrationSWAnalysissoftware(recommendedoption)Framegrabber/PC554-001WLI-Unit-0033Highthroughput2100µm3.0s--554-002WLI-Unit-0055WLIPlanAposeries1X100MitutoyoObjectiveLensScanner108x68x191mm/1.7kg8000µmStandard1900µm4.0s554-003WLI-Unit-01010Highresolution1700µm6.0s4nm40nmWLI-Unitsensorheadterminal/stopconnector/GigaBitEthernet:2chAC100〜240V/50,60Hz20W196x180x108mm/2.3kgWLI-Unitcontrollibrary(SDK),samplecode,WLIPAKSampleGUIPixelcalibrationMCubeMapMatroxframegrabber/PCseparateRecommendedPCSpecificationsOS:Windows10Pro64bit/Windows11Pro64bit,CPU:XeonProcessor8Core(2.0GHzorabove),memory:8GBorabove,storage:25GBorabove,opticaldrive:DVD-ROMdrive(forsoftwareinstalla-tion),communicationport:RJ-45×1port(EtherNET),extensionslots:PCIExpress3.0×8orabove7-8