LEGEX series is an ultra-high precision coordinate measuring machine with the world's top accuracy guaranteed E₀, MPE = (0.28 + L/1000) μm (19 to 21°C).

Features

Adopts a bridge locking / table moving structure perfected over many years.
Minimizes static and dynamic error factors and provides the world's highest measurement accuracy.
A vibration isolation table is equipped as standard for measures against external vibrations.
Body base design minimizes deformation due to load fluctuations and guarantees excellent geometric motion accuracy.